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Role of the thermophoretic force on the transport of nanoparticles in dusty silane plasmas

Kathleen De Bleecker* and Annemie Bogaerts

Wim Goedheer

  • PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, 2610 Wilrijk, Belgium

  • FOM Institute for Plasma Physics ‘‘Rijnhuizen,’’ Association EURATOM-FOM, Trilateral Euregio Cluster, P.O. Box 1207, 3430 BE Nieuwegein, The Netherlands

  • *Electronic address: kathleen.debleecker@ua.ac.be
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Phys. Rev. E 71, 066405 – Published 21 June, 2005

DOI: https://doi.org/10.1103/PhysRevE.71.066405

Abstract

A comparison, based on numerical modeling, is made between the different forces experienced by nanoparticles present in a low pressure capacitively coupled parallel-plate silane (SiH4) discharge. We investigate in particular the influence of the thermophoretic force on the spatial distribution of the nanoparticle density profiles, due to a thermal gradient in gas temperature induced by heating or cooling of the electrodes. A series of simulations with a one-dimensional fluid model are performed with asymmetrical variation of the electrode temperatures. It appears that the resulting density profile of the nanoparticles experiences a significant shift towards the cooler electrode as soon as a temperature difference is applied. Thus thermophoresis is capable of influencing the force balance of suspended nanoparticles in the plasma, even at relatively small electrode temperature differences.

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Phys. Rev. E 71, 066405– Published 21 June, 2005
  • Received 22 January 2005

© 2005 American Physical Society

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