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Mechanical Control of Nonlinearity in Doubly Clamped MEMS Beam Resonators Using Preloaded Lattice-Mismatch Strain

Chao Li1,‡, Boqi Qiu2,‡, Yuri Yoshioka1, Kazuhiko Hirakawa2,3,*, and Ya Zhang1,†

  • 1Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo, 184-8588, Japan
  • 2Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
  • 3Institute for Nano Quantum Information Electronics, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

  • *hirakawa@iis.u-tokyo.ac.jp
  • †zhangya@go.tuat.ac.jp
  • ‡Chao Li and Boqi Qiu contributed equally to this work.
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Phys. Rev. Applied 19, 024025 – Published 9 February, 2023

DOI: https://doi.org/10.1103/PhysRevApplied.19.024025

Abstract

We theoretically clarify the mechanism of the strain-tuning effect for control of the mechanical nonlinearity in doubly clamped MEMS beam resonators and experimentally demonstrate that nonlinearity can be effectively suppressed with a preloaded lattice-mismatch strain in the MEMS beam. Mechanical nonlinearity arises from the hardening- and softening-nonlinearity terms in the Duffing motion equation of the MEMS beam. By approaching the buckling condition of the MEMS beam, the substantially increased softening nonlinearity greatly compensates for the hardening nonlinearity, resulting in suppression of the total nonlinearity. Utilizing this knowledge, we fabricate InxGa1−xAs MEMS beams with a preloaded lattice-mismatch strain, which is achieved by adding a small amount (x = ∼0.4%) of indium to the GaAs MEMS beam during wafer growth. The buckling condition in the experiment is achieved by carefully modulating the length of the InxGa1−xAs MEMS beams. As a result, mechanical nonlinearity is largely modulated from hardening to softening and reaches a quasizero value near the buckling condition, demonstrating the effectiveness of using lattice mismatch for controlling the mechanical nonlinearity of MEMS resonators.

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Phys. Rev. Applied 19, 024025– Published 9 February, 2023
  • Received 26 April 2022
  • Revised 19 October 2022
  • Accepted 23 December 2022
Article part of CHORUS
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