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Transport processes during the growth of oxide films at elevated temperature

A. Atkinson

A. Atkinson

  • Materials Development Division, Building 552, AERE Harwell, Didcot OX11 0RA, England

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Rev. Mod. Phys. 57, 437 – Published 1 April, 1985

DOI: https://doi.org/10.1103/RevModPhys.57.437

Abstract

The current understanding of the growth of thermal oxide films in terms of the transport properties of the oxides is reviewed. Emphasis is placed on examining quantitative relationships between the film growth rate and other measurable parameters of the oxides. The theories of film growth which are expected to apply in the extreme limits of thick films (Wagner) and thin films (Cabrera and Mott) are outlined. Particular attention is given to examining the expected limits of validity of these theories and to the various ways in which their predictions can be tested experimentally. The growth of a selection of important oxides is then discussed in the light of these two theories. The examples (CoO, NiO, Fe3O4, Cr2O3, Al2O3, and SiO2) have been selected such that together they serve to test the theories, have technological relevance, and exhibit a wide variation in behavior. The dominant role of diffusion along oxide grain boundaries in controlling the growth of the crystalline oxides is highlighted.

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References (149)

  1. Atkinson, A., 1982, Corros. Sci. 22, 347
  2. Atkinson, A., A. E. Hughes and A. Hammou, 1981, Philos. Mag. A 43, 1071
  3. Atkinson, A., F. C. W. Pummery, and C. Monty, 1985, "Diffusion of O18 tracer in NiO grain boundaries" in Proceedings of 3rd International Conference on Transport in Non-Stoichiometric Compounds, Pennsylvania State University (to be published)
  4. Atkinson, A., and R. I. Taylor, 1979, Philos. Mag. A 39, 581
  5. Atkinson, A., and R. I. Taylor, 1981, Philos. Mag. A 43, 979
  6. Atkinson, A., and R. I. Taylor, 1982, High Temp. High Pressures 14, 571
  7. Atkinson, A., and R. I. Taylor, 1983, J. Mater. Sci. 18, 2371
  8. Atkinson, A., and R. I. Taylor, 1985, "Diffusion of Cr51 tracer in Cr2O3 and the growth of Cr2O3 films" in Proceedings of 3rd International Conference on Transport in Non-Stoichiometric Compounds, Pennsylvania State University (to be published)
  9. Atkinson, A., R. I. Taylor, and P. D. Goode, 1979, Oxid. Met. 13, 519
  10. Atkinson, A., R. I. Taylor, and A. E. Hughes, 1982, Philos. Mag. A 45, 823
  11. Barnes, D. G., J. M. Calvert, K. A. Hay, and D. G. Lees, 1973, Philos. Mag. 28, 1303
  12. Berry, L., and J. Paidassi, 1966, C. R. Acad. Sci. 262, C-1353
  13. Blanc, J., 1978, Appl. Phys. Lett. 33, 424
  14. Boggs, W. E., R. H. Kachik, and G. E. Pellissier, 1965, J. Electrochem. Soc. 112, 539
  15. Brückman, A., and J. Romanski, 1965, Corros. Sci. 5, 185
  16. Cabrera, N., and N. F. Mott, 1949, Rep. Prog. Phys. 12, 163
  17. Caplan, D., and M. Cohen, 1966, Corros. Sci. 6, 321
  18. Caplan, D., M. J. Graham, and M. Cohen, 1972, J. Electrochem. Soc. 119, 1205
  19. Caplan, D., and G. I. Sproule, 1975, Oxid. Met. 9, 5
  20. Caplan, D., G. I. Sproule, R. J. Hussey, and M. J. Graham, 1978, Oxid. Met. 12, 67
  21. Catlow, C. R. A., W. C. Mackrodt, M. J. Norgett, and A. M. Stoneham, 1979, Philos. Mag. A 40, 161
  22. Channing, D. A., and M. J. Graham, 1972, Corros. Sci. 12, 271
  23. Chen, W. K., and R. A. Jackson, 1969, J. Phys. Chem. Solids 30, 1309
  24. Chen, W. K., and N. L. Peterson, 1975, J. Phys. Chem. Solids 36, 1097
  25. Davies, D. E., U. R. Evans, and J. N. Agar, 1954, Proc. R. Soc. London Ser. A 225, 443
  26. Deal, B. E., 1978, J. Electrochem. Soc. 125, 576
  27. Deal, B. E., and A. S. Grove, 1965, J. Appl. Phys. 36, 3770
  28. Dieckmann, R., 1977, Z. Phys. Chem. Neue Folge 107, 189
  29. Dieckmann, R., 1984, Solid State Ionics 12, 1
  30. Dieckmann, R., and H. Schmalzried, 1977, Ber. Bunsenges. Phys. Chem. 81, 414
  31. Dignam, M. J., D. J. Young, and D. G. W. Goad, 1973, J. Phys. Chem. Solids 34, 1227
  32. Doremus, R. H., 1976, J. Phys. Chem. 80, 1773
  33. Dubois, C., C. Monty, and J. Philibert, 1982, Philos. Mag. 46, 419
  34. Fair, R. B., 1981, in Silicon Integrated Circuits, edited by D. Kahng, Applied Solid State Science, Supplement 2B (Academic, New York), pp. 1-108
  35. Fehlner, F. P., 1972, J. Electrochem. Soc. 119, 1723
  36. Fehlner, F. P., 1984, J. Electrochem. Soc. 131, 1645
  37. Francis, R., and D. G. Lees, 1976, Corros. Sci. 16, 847
  38. Fromhold, A. T., 1976, Theory of Metal Oxidation—Volume 1, Fundamentals, Defects in Crystalline Solids (North-Holland, Amsterdam), Vol. 9
  39. Fromhold, A. T., 1979, J. Phys. Soc. Jpn. 48, 2022
  40. Fromhold, A. T., 1980, Theory of Metal Oxidation—Volume 2, Space Charge, Defects in Solids (North-Holland, Amsterdam), Vol. 12
  41. Fueki, K., and J. B. Wagner, 1965, J. Electrochem. Soc. 112, 384
  42. Garnaud, G., and R. A. Rapp, 1977, Oxid. Met. 11, 193
  43. Gesmundo, F., and F. Viani, 1981, J. Electrochem. Soc. 128, 460
  44. Gesmundo, F., and F. Viani, 1982, Solid State Ionics 6, 33
  45. Ghez, R., 1973, J. Chem. Phys. 58, 1838
  46. Ghez, R., and Y. J. van der Meulen, 1972, J. Electrochem. Soc. 119, 1100
  47. Gibbs, G. B., 1973, Oxid. Met. 7, 173
  48. Gibson, J. M., and D. Dong, 1980, J. Electrochem. Soc. 127, 2722
  49. Gleave, C., J. M. Calvert, D. G. Lees, and P. C. Rowlands, 1982a, Proc. R. Soc. London Ser. A 379, 409
  50. Gleave, C., J. M. Calvert, D. G. Lees, and P. C. Rowlands, 1982b, Proc. R. Soc. London Ser. A 379, 429
  51. Goodman, A. M., and J. M. Breece, 1970, J. Electrochem. Soc. 117, 982
  52. Goursat, A. G., and W. W. Smeltzer, 1973, Oxid. Met. 6, 101
  53. Graham, M. J., and M. Cohen, 1972, J. Electrochem. Soc. 119, 879
  54. Grimley, T. B., 1955, in Chemistry of the Solid State, edited by W. E. Garner (Butterworths, London), p. 336
  55. Himmel, L., R. F. Mehl, and C. E. Birchenall, 1953, Trans. Am. Inst. Min. Eng. 197, 827
  56. Hindam, H., and D. P. Whittle, 1983, Oxid. Met. 18, 245
  57. Hoshino, K., and N. L. Peterson, 1983, J. Am. Ceram. Soc. 66, C-202
  58. Hagel, W. C., and A. U. Seybolt, 1961, J. Electrochem. Soc. 108, 1146
  59. Hope, G. A., and I. M. Ritchie, 1976, Thin Solid Films 34, 111
  60. Hunt, G. L., and I. M. Ritchie, 1970, Oxid. Met. 2, 361
  61. Hussey, R. J., D. Caplan, and M. J. Graham, 1981, Oxid. Met. 15, 421
  62. Hussey, R. J., and M. J. Graham, 1981, Corros. Sci. 21, 255
  63. Hussey, R. J., G. I. Sproule, D. Caplan, and M. J. Graham, 1977, Oxid. Met. 11, 67
  64. Irene, E. A., 1982a, Appl. Phys. Lett. 40, 74
  65. Irene, E. A., 1982b, J. Electrochem. Soc. 129, 413
  66. Irene, E. A., 1982c, J. Electrochem. Soc. 129, 2594
  67. Irene, E. A., D. Dong, and R. J. Zeto, 1980, J. Electrochem. Soc. 127, 396
  68. Irene, E. A., and R. Ghez, 1977, J. Electrochem. Soc. 124, 1757
  69. Irene, E. A., and Y. J. van der Meulen, 1976, J. Electrochem. Soc. 123, 1380
  70. Jorgensen, P. J., 1962, J. Chem. Phys. 37, 874
  71. Jorgensen, P. J., 1967, J. Electrochem. Soc. 114, 820
  72. Kassner, T. F., L. C. Walters, and R. E. Grace, 1966, Proceedings of Symposium on Thermodynamics with Emphasis on Nuclear Materials and Atomic Transport in Solids (IAEA, Vienna), Vol. 2, p. 357
  73. Khoi, N. N., W. W. Smeltzer and J. D. Embury, 1975, J. Electrochem. Soc. 122, 1495
  74. Kliewer, K. L., and J. S. Koehler, 1965, Phys. Rev. 140, 1226A
  75. Kofstad, P., 1966, High Temperature Oxidation of Metals (Wiley, New York)
  76. Kofstad, P., 1972, Nonstoichiometry, Diffusion and Electrical Conductivity in Binary Metal Oxides (Wiley, New York)
  77. Kofstad, P., and K. P. Lillerud, 1980, J. Electrochem. Soc. 127, 2410
  78. Kofstad, P., and K. P. Lillerud, 1982, Oxid. Met. 17, 177
  79. Kröger, F. A., 1974, The Chemistry of Imperfect Crystals, 2nd ed. (North-Holland, Amsterdam), Vol. 3
  80. Kröger, F. A., 1983, in High-Temperature Corrosion, edited by R. A. Rapp, NACE 6 (National Association of Corrosion Engineers, Houston), p. 89
  81. Lawless, K. R., 1974, Rep. Prog. Phys. 37, 231
  82. Lees, D. G., and J. M. Calvert, 1976, Corros. Sci. 16, 767
  83. Lesage, B., and A. M. Huntz, 1980, Scr. Metall. 14, 1143
  84. Lie, L. N., R. R. Razouk, and B. E. Deal, 1982, J. Electrochem. Soc. 129, 2828
  85. Lillerud, K. P., and P. Kofstad, 1980, J. Electrochem. Soc. 127, 2397
  86. Lillerud, K. P., and P. Kofstad, 1982a, Oxid. Met. 17, 127
  87. Lillerud, K. P., and P. Kofstad, 1982b, Oxid. Met. 17, 195
  88. Liu, H.-T., A. F. Armitage, and D. P. Woodruff, 1982, Surf. Sci. 114, 431
  89. Lloyd, I. K., and H. K. Bowen, 1981, J. Am. Ceram. Soc. 64, 744
  90. Mills, T. G., and F. A. Kröger, 1973, J. Electrochem. Soc. 120, 1582
  91. Mitchell, D. F., and M. J. Graham, 1982, Surf. Sci. 114, 546
  92. Mitchell, D. F., P. B. Sewell, and M. Cohen, 1976, Surf. Sci. 61, 355
  93. Mitchell, D. F., P. B. Sewell, and M. Cohen, 1977, Surf. Sci. 69, 310
  94. Mitchell, D. F., R. J. Hussey, and M. J. Graham, 1983, J. Vac. Sci. Technol. A 1, 1006
  95. Moseley, P. T., G. Tappin, and J. C. Rivière, 1982, Corros. Sci. 22, 69
  96. Mott, N. F., 1981, Proc. R. Soc. London Ser. A 376, 207
  97. Mott, N. F., 1982, Philos. Mag. A 45, 323
  98. Moulson, A. J., and J. P. Roberts, 1961, Trans. Faraday Soc. 57, 1208
  99. Mrowec, S., 1967, Corros. Sci. 7, 563
  100. Mrowec, S., and K. Przybylski, 1977, Oxid. Met. 11, 365
  101. Muehlenbachs, K., and H. A. Schaeffer, 1977, Can. Mineral. 15, 179
  102. Norton, F. J., 1961, Nature 191, 701
  103. Paladino, A. E., and W. D. Kingery, 1962, J. Chem. Phys. 37, 957
  104. Perrow, J. M., W. W. Smeltzer, and J. D. Embury, 1968, Acta Metall. 16, 1209
  105. Peterson, N. L., and W. K. Chen, 1980, J. Phys. (Paris), Colloq. C-6, 319
  106. Peterson, N. L., and W. K. Chen, 1982, J. Phys. Chem. Solids 43, 29
  107. Peterson, N. L., W. K. Chen, and D. Wolf, 1980, J. Phys. Chem. Solids 41, 709
  108. Pfeffer, R., and M. Ohring, 1981, J. Appl. Phys. 52, 777
  109. Pritchard, A. M., J. E. Antill, K. R. J. Cottell, K. A. Peakall, and A. E. Truswell, 1975, Oxid. Met. 9, 181
  110. Pritchard, A. M., N. E. W. Hartley, J. F. Singleton, and A. E. Truswell, 1980, Corros. Sci. 20, 1
  111. Raynaud, G. M., W. A. T. Clark, and R. A. Rapp, 1984, Metall. Trans. 15A, 573
  112. Razouk, R. R., L. N. Lie, and B. E. Deal, 1981, J. Electrochem. Soc. 128, 2214
  113. Reddy, K. P. R., 1979, Ph.D. thesis, Case Western Reserve University
  114. Reddy, K. P. R., J. L. Smialek, and A. R. Cooper, 1982, Oxid. Met. 17, 429
  115. Reddy, K. P. R., and A. R. Cooper, 1982, J. Am. Ceram. Soc. 65, 634
  116. Reed, D. J., and B. J. Wuensch, 1980, J. Am. Ceram. Soc. 63, 88
  117. Revesz, A. G., and H. A. Schaeffer, 1982, J. Electrochem. Soc. 129, 357
  118. Rhines, F. N., and R. G. Connell, 1977, J. Electrochem. Soc. 124, 1122
  119. Rhines, F. N., R. G. Connell, and M. S. Choi, 1979, J. Electrochem. Soc. 126, 1061
  120. Rhines, F. N., and J. S. Wolf, 1970, Metall. Trans. 1, 1701
  121. Rigo, S., F. Rochet, A. Straboni, and B. Agius, 1981, in The Physics of MOS Insulators, edited by G. Lucovsky, S. Pantelides, and F. L. Galeener (Pergamon, New York), p. 167
  122. Ritchie, I. M., G. H. Scott, and P. J. Fensham, 1970, Surf. Sci. 19, 230
  123. Roberts, G. J., and J. P. Roberts, 1966, Phys. Chem. Glasses 7, 82
  124. Rosenberg, A. J., 1960, J. Electrochem. Soc. 107, 795
  125. Rosencher, E., A. Straboni, S. Rigo, and G. Amsel, 1979, Appl. Phys. Lett. 34, 254
  126. Rowlands, P. C., and M. I. Manning, 1983, in High Temperature Corrosion, edited by R. A. Rapp, NACE 6 (National Association of Corrosion Engineers, Houston), p. 30
  127. Sangster, M. J. L., and D. K. Rowell, 1981, Philos. Mag. A 44, 613
  128. Schaeffer, H. A., 1978, J. Mater. Sci. Lett. 13, 1146
  129. Schaeffer, H. A., 1980, J. Non-Cryst. Solids 38, 545
  130. Schottky, W., 1939, Z. Phys. 113, 367
  131. Sheasby, J. S., and J. D. Brown, 1978, Oxid. Met. 5, 405
  132. Sheasby, J. S., and D. B. Jory, 1978, Oxid. Met. 12, 527
  133. Sleppy, W. C., 1961, J. Electrochem. Soc. 108, 1097
  134. Smeltzer, W. W., and D. J. Young, 1975, Prog. Solid State Chem. 10, 17
  135. Taft, E. A., 1978, J. Electrochem. Soc. 125, 968
  136. Tammann, G., 1920, Z. Anorg. Allg. Chem. 111, 78
  137. Tannhauser, D. S., 1974, in Defects and Transport in Oxides, edited by M. S. Seltzer and R. I. Jaffee (Plenum, New York), p. 333
  138. Taylor, M. R., J. M. Calvert, D. G. Lees, and D. B. Meadowcroft, 1980, Oxid. Met. 14, 499
  139. Volpe, M. L., and J. Reddy, 1970, J. Chem. Phys. 53, 1117
  140. Wagner, C., 1933, Z. Phys. Chem. B 21, 25
  141. Williams, E. L., 1965, J. Am. Ceram. Soc. 48, 190
  142. Wittenhauer, M. A., and L. L. Van Zandt, 1982, Philos. Mag. 46, 659
  143. Wood, G. C., and F. H. Stott, 1983, in High Temperature Corrosion, edited by R. A. Rapp, NACE 6 (National Association of Corrosion Engineers, Houston), p. 227
  144. Yee, J., and F. A. Kröger, 1973, J. Am. Ceram. Soc. 56, 189
  145. Young, D. J., and M. Cohen, 1977a, J. Electrochem. Soc. 124, 769
  146. Young, D. J., and M. Cohen, 1977b, J. Electrochem. Soc. 124, 775
  147. Young, D. J., and M. J. Dignam, 1973, J. Phys. Chem. Solids 34, 1235
  148. Young, F. W., J. V. Cathcart, and A. T. Gwathmey, 1956, Acta Metall. 4, 145
  149. Yurek, G. J., J. P. Hirth, and R. A. Rapp, 1974, Oxid. Met. 8, 263

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Rev. Mod. Phys. 57, 437– Published 1 April, 1985

    © 1985 American Physical Society

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