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Simulating the influence of stoichiometry on the spectral emissivity of MoxSiy thin films

Zahra Golsanamlou*, Arseniy Baskakov, Robbert van de Kruijs, Marcelo Ackermann, and Menno Bokdam

Silvester Houweling and Giorgio Colombi

  • University of Twente, Faculty of Science and Technology and MESA+ Institute for Nanotechnology, P.O. Box 217, 7500 AE Enschede, the Netherlands

  • ASML Research, Materials and Chemistry, 5504 DT Veldhoven, the Netherlands

  • *Contact author: z.golsanamlou@dynamicsolids.net
  • Contact author: m.bokdam@utwente.nl

Phys. Rev. Materials 10, 036002 – Published 16 March, 2026

DOI: https://doi.org/10.1103/6v8t-117b

Abstract

In this work, we simulate the spectral emissivity of various stoichiometric crystal phases of MoxSiy compounds using density functional perturbation theory. The dielectric function, including electronic and ionic contributions, is calculated for each phase. We use the bulk properties obtained to simulate the optical absorption spectrum originating from the compound in thin film (20nm) form. We find that most thin films of MoxSiy are metallic, however, our results indicate that their emissivity is not simply correlated with the Mo content. For hot metallic films at around 900 K, we predict a maximal emissivity between 5–10 nm thickness. Our results are in good qualitative agreement with experiments, confirming that the emissivity of hexagonal MoSi2 is much lower than in the tetragonal phase. This is related to the small band gap (hexagonal MoSi2) and low density of states at the Fermi level (tetragonal MoSi2). Furthermore, test calculations on defected MoSi2 demonstrate that the infrared emissivity of MoSi2 thin films can be substantially increased by introducing defects.

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