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  • Access by Xinjiang University

In Situ Monitoring of the Thermal-Annealing Effect in a Monolayer of MoS2

Liqin Su1, Yifei Yu2, Linyou Cao2, and Yong Zhang1,*

  • 1Department of Electrical and Computer Engineering, University of North Carolina at Charlotte, Charlotte, North Carolina 28223, USA
  • 2Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA

  • *yong.zhang@uncc.edu

Phys. Rev. Applied 7, 034009 – Published 10 March, 2017

DOI: https://doi.org/10.1103/PhysRevApplied.7.034009

Abstract

We perform in situ two-cycle thermal-annealing studies for a transferred CVD-grown monolayer MoS2 on a SiO2/Si substrate, using spatially resolved micro-Raman and photoluminescence spectroscopy. The evolution in film morphology and film-substrate bonding is continuously monitored by Raman spectroscopy. After the thermal cycling and being annealed at 305°C twice, the film morphology and film-substrate bonding are significantly modified, which together with the removal of polymer residues causes major changes in the strain and doping distribution over the film, and thus the optical properties. Before annealing, the strain associated with ripples in the transferred film dominates the spatial distributions of the photoluminescence peak position and intensity over the film; after annealing, the variation in film-substrate bonding, affecting both strain and doping, becomes the leading factor. This work reveals that the film-substrate bonding, and thus the strain and doping, is nonstationary under thermal stress, which is important for understanding the substrate effects on the optical and transport properties of the 2D material and their impact on device applications.

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